CMS filter and flowmeter


Water vapor and microscopic particles can fowl up the CMS. One needs to make sure the fresh gas is clean. The system uses two filters: a pre-filter and a coalescing filter. The first traps water vapor and 5 um particles. The second filter particles down to 0.01 um. These are 1/4" port Wilkerson filters. The part numbers are F16-02-000 and M16-02-000, respectively.



The PSA has high pressure tubing coming off of the check-valve. The tubing from the two beds join together on a TEE. The output then goes to a high pressure valve that can shut off all flow. From here, the output goes to a Yokogawa rotometer, so one can control and measure the output flow.

flow meter

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